Rf discharge dissociative mode in NF3 and SiH4

Journal of Physics D: Applied Physics

Volumn 40, Issue 21, 2007, Pages 6631-6640

  Lisovskiy, V ^a   Booth, J P ^b   Landry, K ^c   Douai, D ^d   Cassagne, V ^e   Yegorenkov, V ^a  

^a V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

^b ECOLE POLYTECHNIQUE   (France)

^c Unaxis Displays Division France SAS   (France)

^d IRFM   (France)

^e Riber   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC CURRENTS; ELECTRONS; IONIZATION; MOLECULAR STRUCTURE; NATURAL FREQUENCIES;

DISSOCIATION DEGREE; GAS MOLECULES; HIGH ENERGY ELECTRONS; RF DISCHARGE DISSOCIATIVE MODE;

ELECTRIC DISCHARGES;

EID: 35548992001     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/21/023     Document Type: Article

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