Polymorphous Si thin films from radio frequency plasmas of SiH4 diluted in Ar: A study by transmission electron microscopy and Raman spectroscopy

Journal of Applied Physics

Volumn 90, Issue 8, 2001, Pages 4272-4280

  Viera, G ^a   Huet, S ^a   Bertran, E ^b   Boufendi, L ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039149507     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1398066     Document Type: Article

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