Alpha-gamma transition in RF capacitive discharge in low-pressure oxygen

Vacuum

Volumn 74, Issue 1, 2004, Pages 19-28

  Lisovskiy, V A ^a   Yegorenkov, V D ^a  

^a V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

Author keywords

Low pressure; Negative ions; Probe; Radio frequency capacitive discharge

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; FREQUENCIES; IONIZATION; NEGATIVE IONS; OXYGEN; PHASE SHIFT; PLASMA DENSITY; PLASMA SHEATHS; POLYMERS; PROBES;

LOW PRESSURE; RADIO-FREQUENCY CAPACITIVE DISCHARGE;

CURRENT VOLTAGE CHARACTERISTICS;

EID: 1842864883     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.11.003     Document Type: Article

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