Hydrogen elimination and phase transitions in pulsed-gas plasma deposition of amorphous and microcrystalline silicon

Journal of Applied Physics

Volumn 81, Issue 6, 1997, Pages 2847-2855

  Srinivasan, Easwar ^a   Parsons, Gregory N ^a  

^a Campus Box 7908   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000522856     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364309     Document Type: Article

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