Optimizing utilization efficiencies in electronegative discharges: The importance of the impedance phase angle

Journal of Applied Physics

Volumn 86, Issue 9, 1999, Pages 4825-4835

  Entley, W R ^a   Langan, J G ^a   Felker, B S ^a   Sobolewski, M A ^b  

^a AIR PRODUCTS AND CHEMICALS INC   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000395487     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371449     Document Type: Article

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