The role of diluents in electronegative fluorinated gas discharges

Journal of Applied Physics

Volumn 79, Issue 8, 1996, Pages 3886-3894

  Langan, J G ^a   Beck, S E ^a   Felker, B S ^a   Rynders, S W ^a  

^a AIR PRODUCTS AND CHEMICALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001461383     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361813     Document Type: Article

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