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Plasma Sources Science and Technology

Volumn 7, Issue 3, 1998, Pages 348-358

Two-dimensional modelling of SiH4-H2 radio-frequency discharges for a-Si:H deposition

(5) Leroy, Olivier a Gousset, Gérard b Alves, Luís Lemos c Perrin, Jérôme d Jolly, Jacques a

a CNRS (France)

b UNIVERSITÉ PARIS SUD (France)

c INSTITUTO SUPERIOR TÉCNICO (Portugal)

d BALZERS Process Systems (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; COMPUTER SIMULATION; DENSITY (SPECIFIC GRAVITY); GLOW DISCHARGES; HYDROGEN; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; SILANES;

RADIO FREQUENCY DISCHARGES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0032142090 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/7/3/013 Document Type: Article

Times cited : (78)

References (27)

1
- 4043105192
- Kushner M J 1988 J. Appl. Phys. 63 2532
- (1988) J. Appl. Phys. , vol.63 , pp. 2532
- Kushner, M.J.¹

2
- 0000676645
- Nienhuis G J, Goedheer W J, Hamers E A G, van Stark W G J H M and Bezemer J 1997 J. Appl. Phys. 82 2060
- (1997) J. Appl. Phys. , vol.82 , pp. 2060
- Nienhuis, G.J.¹ Goedheer, W.J.² Hamers, E.A.G.³ Van Stark, W.G.J.H.M.⁴ Bezemer, J.⁵

3
- 0012225405
- Kae-Nune P, Perrin J, Guillon J and Jolly J 1995 Plasma Sources Sci. Technol. 4 250
- (1995) Plasma Sources Sci. Technol. , vol.4 , pp. 250
- Kae-Nune, P.¹ Perrin, J.² Guillon, J.³ Jolly, J.⁴

4
- 84955048179
- Godyak V A and Piejak RB 1990 J. Vac. Sci. Technol. A 8 3833
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 3833
- Godyak, V.A.¹ Piejak, R.B.²

5
- 36149033835
- Perrin J, Böhm C, Etemadi R and Lloret A 1994 Plasma Sources Sci. Technol. 3 252
- (1994) Plasma Sources Sci. Technol. , vol.3 , pp. 252
- Perrin, J.¹ Böhm, C.² Etemadi, R.³ Lloret, A.⁴

6
- 35949008125
- Boeuf J P and Pitchford L C 1995 Phys. Rev. E 51 1376
- (1995) Phys. Rev. E , vol.51 , pp. 1376
- Boeuf, J.P.¹ Pitchford, L.C.²

7
- 11744318918
- BOLSIG (Shareware), Kinema Software web site
- BOLSIG (Shareware), Kinema Software (web site: http://www.csn.net/siglo)

8
- 11744283933
- PhD Thesis Université Paul Sabatier
- Bordage MC 1995 PhD Thesis Université Paul Sabatier
- (1995)
- Bordage, M.C.¹

9
- 84926934984
- Tawara H, Itikawa Y, Nishimura H and Yoshino M 1990 J. Phys. Chem. Ref. Data 19 617
- (1990) J. Phys. Chem. Ref. Data , vol.19 , pp. 617
- Tawara, H.¹ Itikawa, Y.² Nishimura, H.³ Yoshino, M.⁴

10
- 0029273473
- Leroy O, Stratil P, Perrin J, Jolly J and Belenguer Ph 1995 J. Phys. D: Appl. Phys. 28 500
- (1995) J. Phys. D: Appl. Phys. , vol.28 , pp. 500
- Leroy, O.¹ Stratil, P.² Perrin, J.³ Jolly, J.⁴ Belenguer, Ph.⁵

11
- 0003556247
- (New York: Wiley) ch 7
- Hirschfelder J O, Curtiss C F and Bird R B 1964 Molecular Theory of Gases and Liquids (New York: Wiley) ch 7
- (1964) Molecular Theory of Gases and Liquids
- Hirschfelder, J.O.¹ Curtiss, C.F.² Bird, R.B.³

12
- 0001883643
- Perrin J, Leroy O and Bordage MC 1996 Contrib. Plasma Phys. 36 3
- (1996) Contrib. Plasma Phys. , vol.36 , pp. 3
- Perrin, J.¹ Leroy, O.² Bordage, M.C.³

13
- 0003762171
- Gallagher A 1986 J. Appl. Phys. 60 1369
- (1986) J. Appl. Phys. , vol.60 , pp. 1369
- Gallagher, A.¹

14
- 0043041072
- Kae-Nune P, Perrin J, Jolly J and Guillon J 1996 Surf. Sci. 360 L495
- (1996) Surf. Sci. , vol.360
- Kae-Nune, P.¹ Perrin, J.² Jolly, J.³ Guillon, J.⁴

15
- 11744259822
- Universidade Técnica de Lisboa, in preparation
- Marques LM 1998 MSc Thesis Universidade Técnica de Lisboa, in preparation
- (1998) MSc Thesis
- Marques, L.M.¹

16
- 0000070491
- Perrin J, Takeda Y, Hirano N, Takeuchi Y and Matsuda A 1989 Surf. Sci. 210 114
- (1989) Surf. Sci. , vol.210 , pp. 114
- Perrin, J.¹ Takeda, Y.² Hirano, N.³ Takeuchi, Y.⁴ Matsuda, A.⁵

17
- 36549100403
- Ho P, Breiland W G and Buss R J 1989 J. Chem. Phys. 91 2627
- (1989) J. Chem. Phys. , vol.91 , pp. 2627
- Ho, P.¹ Breiland, W.G.² Buss, R.J.³

18
- 0000981416
- Doyle J R, Doughty D A and Gallagher A 1990 J. Appl. Phys. 68 4375
- (1990) J. Appl. Phys. , vol.68 , pp. 4375
- Doyle, J.R.¹ Doughty, D.A.² Gallagher, A.³

19
- 0001503719
- Perrin J, Schmitt J P M, DeRosny G, Drevillon B, Huc J and Lloret A 1982 Chem. Phys. 73 383
- (1982) Chem. Phys. , vol.73 , pp. 383
- Perrin, J.¹ Schmitt, J.P.M.² DeRosny, G.³ Drevillon, B.⁴ Huc, J.⁵ Lloret, A.⁶

20
- 0000885371
- Perrin J and Schmitt J 1982 Chem. Phys. 67 167
- (1982) Chem. Phys. , vol.67 , pp. 167
- Perrin, J.¹ Schmitt, J.²

21
- 0031079303
- Leroy O, Perrin J, Jolly J, Péalat M and Lefebvre M 1997 J. Phys. D: Appl. Phys. 30 499
- (1997) J. Phys. D: Appl. Phys. , vol.30 , pp. 499
- Leroy, O.¹ Perrin, J.² Jolly, J.³ Péalat, M.⁴ Lefebvre, M.⁵

22
- 11744377839
- ONERA, Palaiseau, private communication
- Dupoirieux F 1996 ONERA, Palaiseau, private communication
- (1996)
- Dupoirieux, F.¹

23
- 0003815501
- Berlin: Springer
- Hackbusch W 1985 Multi-Grid Methods and Applications (Berlin: Springer)
- (1985) Multi-Grid Methods and Applications
- Hackbusch, W.¹

24
- 0032071997
- Hertl M, Dorval N, Leroy O, Jolly J and Péalat M 1998 Plasma Sources Sci. Technol. 7 130
- (1998) Plasma Sources Sci. Technol. , vol.7 , pp. 130
- Hertl, M.¹ Dorval, N.² Leroy, O.³ Jolly, J.⁴ Péalat, M.⁵

25
- 0000326579
- Abrefah J and Olander D R 1989 Surf. Sci. 209 291
- (1989) Surf. Sci. , vol.209 , pp. 291
- Abrefah, J.¹ Olander, D.R.²

26
- 0002544863
- Pittsburgh, PA: Materials Research Society
- Matsuda A and Goto T 1990 Mater. Res. Soc. Symp. Proc. vol 164 (Pittsburgh, PA: Materials Research Society) p 3
- (1990) Mater. Res. Soc. Symp. Proc. , vol.164 , pp. 3
- Matsuda, A.¹ Goto, T.²

27
- 11744283750
- Böhm C and Perrin J 1992 J. Phys. D: Appl. Phys. 71 4751
- (1992) J. Phys. D: Appl. Phys. , vol.71 , pp. 4751
- Böhm, C.¹ Perrin, J.²

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