A MEMS hybrid inertial sensor based on convection heat transfer

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 113-116

  Zhu, Kong ^a   Su, Yan ^b   Ding, Henggao ^a  

^a TSINGHUA UNIVERSITY   (China)

^b SOUTHEAST UNIVERSITY   (China)

Author keywords

Convection heat transfer; Inertial sensor; Micro electromechanical system (MEMS)

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; ETCHING; HEAT CONVECTION; MICROELECTROMECHANICAL DEVICES; PACKAGING; SILICON; THERMISTORS;

CONVECTION HEAT TRANSFER; HERMETIC CHAMBERS; INERTIAL SENSORS; THERMAL ACCELEROMETERS;

SENSORS;

EID: 27544436298     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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