System modelling of a vibratory micromachined gyroscope with bar structure

Journal of Micromechanics and Microengineering

Volumn 13, Issue 1, 2003, Pages 65-71

  Che, Lufeng ^a   Xiong, Bin ^a   Wang, Yuelin ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CAPACITANCE; COMPUTER SIMULATION; ELECTROSTATICS; MICROMACHINING; NETWORKS (CIRCUITS); VIBRATORS;

CIRCUIT SIMULATIONS;

GYROSCOPES;

EID: 0037233746     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/1/310     Document Type: Article

References (9)

1. Yazdi N, Ayazi F and Najafi K 1998 Micromachined interial sensors Proc. IEEE 86 1640-59
2. Maenaka K, Fujita T, Konishi Y and Maeda M 1996 Analysis of highly sensitive silicon gyroscope with cantilever beam as vibrating mass Sensors Actuators A 54 568-73
3. Mochida Y, Tamura M and Ohwada K 1999 A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes Proc. IEEE Micro-Electro-Mechanical Systems (MEMS'99) 618-23
4. Li X X, Bao M H, Yang H, Shen S Q and Lu D R 1999 A micromachined piezoresistive angular rate sensor with a composite beam structure Sensors Actuators A 72 217-23
5. Gretillat F, Gretillat M A and de Rooij N F 1999 Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation IEEE J. Microelectromech. Syst. 8 243-50
6. Xiong B, Wang Y L, Che L F and Wang W Y 2001 A novel silicon micromachined gyroscope with high Q at atmospheric Proc. SPIE 4601 38-42
7. Tilmans H A C 1996 Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems J. Micromech. Microeng. 6 157-76
8. Veijola T, Kuisma H, Lahdenpera J and Ryhanen T 1995 Equivalent-circuit model of the squeezed gas film in a silicon accelerometer Sensors Actuators A 48 239-48
9. Veijola T, Kuisma H, Lahdenpera J and Ryhanen T 1997 Simulation model for micromechanical angular rate sensor Sensors Actuators A 60 113-21