A high yield rate MEMS gyroscope with a packaged SiOG process

Journal of Micromechanics and Microengineering

Volumn 15, Issue 11, 2005, Pages 2003-2010

  Lee, Moon Chul ^a   Kang, Seok Jin ^a   Jung, Kyu Dong ^a   Choa, Sung Hoon ^a   Cho, Yong Chul ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; THERMAL EXPANSION; VIBRATIONS (MECHANICAL);

ANODIC BONDING; FABRICATION ERRORS; MEMS GYROSCOPES; METALLIC MEMBRANES;

GYROSCOPES;

EID: 27144536556     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/11/003     Document Type: Article

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