A dual axis gas gyroscope utilizing low-doped silicon thermistor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 626-629

  Dau, V T ^a   Shiozawa, T ^b   Dao, D V ^c   Kumagai, H ^b   Sugiyama, S ^a,c  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b Iida   (Japan)

^c RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MACHINE DESIGN; PIEZOELECTRIC DEVICES; SEMICONDUCTOR DEVICES; SENSORS; SILICON; THERMISTORS;

GAS GYROSCOPES; PIEZOELECTRIC PUMPS; SENSOR CONFIGURATION; THERMAL SENSING;

GYROSCOPES;

EID: 26844511337     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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