Ultra-thick and high-aspect-ratio nickel microgyroscope using EFAB™ multi-layer additive electroforming

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 670-673

  Alper, S E ^a   Ocak, I E ^a   Akin, T ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ATMOSPHERIC PRESSURE; BANDWIDTH; ELECTROFORMING; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; NATURAL FREQUENCIES; NICKEL; RESONANCE;

ELECTROFORMED NICKEL; INTERFACE CIRCUITS; MICROGYROSCOPE; MULTI-LAYER ADDITIVE ELECTROFORMING;

GYROSCOPES;

EID: 33750138710     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Maciel, and M. Weinberg, "A Micromachined Comb-Drive Tuning Fork Rate Gyroscope," Proc. of IEEE Micro electro Mechanical Systems Workshop (MEMS'93), Fort Lauderdale, FL, February 1993, pp.143-148.
2. S. Chang, M. Chia, P. Castillo-Borelley, W. Hidgon, Q. Jiang, J. Johnson, L. Obedier, M. Putty, Q. Shi, D. Sparks, and S. Zarabadi, "An Electroformed CMOS Integrated Angular Rate Sensor," Sensors and Actuators A, Vol. 66, pp. 138-143, April 1998.
3. S. E. Alper and T. Akin, "Symmetrical and Decoupled Nickel Microgyroscope on Insulating Substrate," Sensors and Actuators A, Vol. 115, pp. 336-350, September 2004.
4. th Int. Conf. Solid-State Sensors and Actuators (TRANSDUCERS'99), Sendai, Japan, June 1999, pp. 1574-1577.
5. www.microfabrica.com