Design and fabrication of a microfluid angular rate sensor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 363-366

  Zhou, Jian ^a   Yan, Guizhen ^a   Zhu, Yong ^a   Xiao, Zhiyong ^a   Fan, Jie ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANEMOMETERS; COMPUTER SIMULATION; ELECTRIC LOADS; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

ANTI-OVERLOADS; HOT-WIRE ANEMOMETERS; JET PUMP THEORY; MICROFLUID ANGULAR RATE SENSORS;

SENSORS;

EID: 26844477580     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. H. Ren, F. Zhang, "Research of the Piezoelectric Fluidic Angular Rate Sensor" Journal of Transducer Technology (in Chinese), vol.17, pp. 16-18, 1998
2. Moffatt,E.Marston,Swarts, "Jet flow in an angular velocity sensor", United States Patent, 4716763, Jan.20, 1988
3. F. Zhang, "Jetflow Inertial Devices", Electronic Components&Materials (in Chinese), vol.18, pp.31-38, 1999
4. A.E.Perry, "Hot-wire Anemometry", Oxford University Press, New York, 1982
5. H. Lu, "Theory and Application of Jet Pump", Shuili Dianli Publishing House, Beijing, 1989