A dual axis gas gyroscope based on convective and thermo-resistive effects in silicon with low thermal-induced stress sensing element

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 594-597

  Dao, Dzung Viet ^a   Dau, Van Thanh ^b   Shiozawa, Tatsuo ^c   Kumaga, Hideo ^c   Sugiyama, Susumu ^a,b  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

^c Iida   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL NONLINEARITIES; MICROSENSORS; PIEZOELECTRIC MATERIALS; SEMICONDUCTOR MATERIALS; SENSITIVITY ANALYSIS; THERMAL EFFECTS;

CROSS-SENSITIVITIES; INPUT AXES; THERMAL SENSING;

GYROSCOPES;

EID: 33750128107     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. V. T. Dau, T. Shiozawa, D. V. Dao, H. Kumagai and S. Sugiyama "A Dual Axis Gas Gyroscope Utilizing Low-Doped Silicon Thermistor", 18th IEEE MEMS (2005), pp.626-629.
2. Jui-Hong Weng, Wei-Hua Chieng, Jenn-Min Lai "Structural design and analysis of micromachined ring-type vibrating sensor of both yaw rate and linear acceleration", Sensors and Actuators, A 117 (2005), pp. 230-240.
3. Kazusuke Maenaka, loku Sunao, Sawai Nobuhiro, Fujita Takayuki, Takayama Yoichiro "Design, fabrication and operation of MEMS gimbal gyroscope", Sensors and Actuators, A121 (2005), pp. 6-15.
4. Veljiko Mlanovic, Edwin Bowen, Mona E. Zaghloul, N. H. Tea, J. S. Suehle, B. Payne and M. Gaitanl, "Micromachined convective accelerometers in standard integrated circuits technology", Applied Physics Letters, Vol. 76, No.4, pp. 508-510.
5. F. Mailly, A. Giani, A. Martinez, R. Bonnot, P. Temple-Boyer, A. Boyerl, "Micromachined thermal accelerometer", Sensor and Actuator, 2003, pp.359-363.
6. A. J. Chapman 1987 Fundamentals of Heat Transfer (MacMillan)