Laterally actuated multicontact MEMS relay fabricated using MetalMUMPS process: Experimental characterization and multiscale contact modeling

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 6, Issue 2, 2007, Pages

  Almeida, Lia ^a   Ramadoss, Ramesh ^a   Jackson, Robert ^b   Ishikawa, Koji ^c   Yu, Qiang ^c  

^a AUBURN UNIVERSITY   (United States)

^b AUBURN UNIVERSITY   (United States)

^c YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

Comb drive actuator; MEMS relay; MetalMUMPS; Multicontact relay; Multiscale model; Ohmic contact relay

Indexed keywords

ELECTROSTATIC ACTUATORS; FABRICATION; MATHEMATICAL MODELS; OHMIC CONTACTS; SUBSTRATES;

COMB-DRIVE ACTUATORS; MEMS RELAYS; MULTICONTACT RELAYS; MULTISCALE MODELS; OHMIC-CONTACT RELAYS;

MEMS;

EID: 34548020298     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2744240     Document Type: Article

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