Contact resistance and adhesion in a MEMS microswitch

Contact Mechanics - Friction: Modeling and Experiment

Volumn , Issue , 2003, Pages 79-84

  Majumder, Sumit ^a   McGruer, Nicol ^b   Adams, George G ^b  

^a Radant MEMS   (United States)

^b Northeastern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANTENNAS; CAPACITANCE; ELECTRIC RELAYS; ELECTRIC RESISTANCE; ELECTROMAGNETISM; ELECTROSTATICS; HYSTERESIS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PLASTICITY; TRANSISTORS;

CONTACT RESISTANCE; MICROSWITCHES;

ELECTRIC SWITCHES;

EID: 1842425995     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/2003-trib-0270     Document Type: Conference Paper

References (21)

1. Rebeiz, G.M., and Muldavin, J.B., 2001, "RF MEMS Switches and Switch Circuits", IEEE Microwave Magazine, pp. 59-71.
2. Zavracky, P.M., Majumder, S., and McGruer, N.E., 1997, "Micromechanical Switches Fabricated Using Nickel Surface Micromachining," Journal of Microelectromechanical Systems, 6, pp. 3-9.
3. Majumder, S., McGruer, N.E., Zavracky, P.M., 1997, "Electrostatically Actuated Micromechanical Switches," Journal of Vacuum Science and Technology, A15, pp. 1246-1249.
4. Majumder, S., McGruer, N.E., Zavracky, P.M., Adams, G.G., Morrison, R.H., and Krim, J., 1998, "Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch," ASME International Mechanical Engineering Congress, DSC-66, Microelectromechanical Systems, pp 341-346.
5. Majumder, S., McGruer, N.E., Adams, G.G., Zavracky, A.P., Zavracky, P.M., Morrison R.H., and Krim, J., 2001, "Study of Contacts in an Electrostatically Actuated Microswitch," Sensors and Actuators A, 93, pp. 19-26.
6. Kruglick, E.J.J., and Pister, K.S.J., 1999, "Lateral MEMS Microcontact Considerations," Journal of Microelectromechanical Systems, 8, pp. 264-271.
7. Lafontan, X., Dufaza, C., Robert, M., Pressecq, F., and Perez, G., 2001, "Concepts, Characterization and Modeling of MEMS Micro-Switches with Gold Contacts in MUMPS", Proceedings of SPIE - The International Society for Optical Engineering, 4408, pp. 381-390.
8. Beale, J., and Pease, R.F., 1994, "Limits of High-Density, Low-Force Pressure Contacts," IEEE Transactions on Components, Packaging, and Manufacturing Technology Part A, 17, pp. 257-262.
9. Bromley, S.C., and Nelson, B.J., 2001, "Performance of Microcontacts Tested with a Novel MEMS Device," Electrical Contacts, Proceedings of the Annual Holm Conference on Electrical Contacts, pp. 122-127.
10. Majumder, S., 2003, Contact Properties of a MEM Switch with Gold-on-Gold Contacts, Doctoral Dissertation, Department of Electrical and Computer Engineering, Northeastern University, Boston, MA.
11. Johnson, K.L., Kendall, K., and Roberts, A.D., 1971, "Surface Energy and the Contact of Elastic Solids," Proceedings of the Royal Society of London, A324, pp. 301-313.
12. Derjaguin, B.V., Muller, V.M., and Toporov, Y.P., 1975, "Effect of Contact Deformation on the Adhesion of Particles", Journal of Colloidal and Interface Science, 53, pp. 314-326.
13. Tabor, D., 1976, "Surface Forces and Surface Interactions", Journal of Colloidal and Interface Science, 58, pp. 1-13.
14. Maugis, D., and Pollock, H.M., 1984, "Surface Forces, Deformation and Adherence at Metal Microcontacts", Acta Metallurgica, 32, pp. 1323-1334.
15. Roy Chowdury, S.K., and Pollock, H.M., 1981, "Adhesion Between Metal Surfaces: The Effect of Surface Roughness," Wear, 66, pp. 307-321.
16. Studman, C.J., Moore, M.A. and Jones, S.E., 1976, "On the Correlation of Indentation Experiments", Journal of Physics D, Applied Physics, 10, pp. 949-956.
17. Johnson, K. L., 1985, Contact Mechanics, Cambridge University Press, Cambridge, MA.
18. Greenwood, J. A., and Williamson, J.B.P., 1966, "Contact of Nominally Flat Surfaces", Proceedings of the Royal Society (London), A295, pp. 300-319.
19. Jansen, A.G.M., van Gelder, A.P., and Wyder, P., 1980, "Point-Contact Spectroscopy in Metals", Journal of Physics, C13, pp. 6073-6118.
20. Holm, R., 1967, Electric Contacts, Springer-Verlag, New York.
21. Wexler, G., 1980, "The Size Effect and the Non-Local Boltzmann Transport Equation in Orifice and Disk Geometry", Proceedings of the Physical Society, 89, pp. 927-941.