Micromechanical relay with electrostatic actuation and metallic contacts

Journal of Micromechanics and Microengineering

Volumn 9, Issue 4, 1999, Pages 324-331

  Gretillat M A ^a,b   Gretillat F ^b   De Rooij, N F ^b  

^a Intersema Sensoric SA   (Switzerland)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTROSTATICS; GOLD; MICROACTUATORS; NICKEL; SEMICONDUCTING SILICON;

ELECTROMAGNETIC ACTUATION; MICROMECHANICAL RELAY;

ELECTRIC RELAYS;

EID: 0342561650     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/4/307     Document Type: Article

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