Experimental and theoretical investigation of contact resistance and reliability of lateral contact type ohmic MEMS relays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6111, Issue , 2006, Pages

  Almeida, Lia ^a   Ishikawa, Koji ^b   Yu, Q ^b   Jackson, R ^c   Ramadoss, R ^a  

^a AUBURN UNIVERSITY   (United States)

^b YOKOHAMA NATIONAL UNIVERSITY   (Japan)

^c AUBURN UNIVERSITY   (United States)

Author keywords

Asperity contact model; Comb drive Actuator; MEMS; MEMS Relay; MEMS Reliability; MetalMUMPS; Multi contact Relay; Ohmic Contact Relay; Stiction in MEMS

Indexed keywords

ELECTROSTATICS; GOLD; MICROACTUATORS; NICKEL PLATING; SUSPENSIONS (COMPONENTS);

ASPERITY CONTACT MODEL; COMB-DRIVE ACTUATORS; MEMS; MEMS RELAY; MEMS RELIABILITY; METALMUMPS; MULTI-CONTACT RELAY; OHMIC-CONTACT RELAY; STICTION IN MEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33646018024     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.659785     Document Type: Conference Paper

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