Lateral MEMS microcontact considerations

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 264-271

  Kruglick, Ezekiel J J ^a   Pister, Kristofer S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC NETWORK ANALYSIS; ELECTRIC RELAYS; MICROELECTROMECHANICAL DEVICES; TRIBOLOGY;

MICROCONTACTS; MICRORELAYS;

ELECTRIC CONTACTS;

EID: 0032594983     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788630     Document Type: Article

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