Comparison of lateral and vertical switches for application as microrelays

Journal of Micromechanics and Microengineering

Volumn 9, Issue 2, 1999, Pages 146-150

  Schiele, Ignaz ^a   Hillerich, Bernd ^a  

^a Fraunhofer Institut fur Festkorpertechnologie   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC RESISTANCE; ETCHING; SEMICONDUCTING SILICON; SEMICONDUCTOR RELAYS; SEMICONDUCTOR SWITCHES; STIFFNESS; STRESSES;

DEEP SILICON ETCHING PROCESS; LATERAL MOTION SWITCH; MICRORELAYS;

MICROELECTRONICS;

EID: 0033138332     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/2/310     Document Type: Article

References (6)

1. Schlaak H, Arndt F, Hanke M and Schimkat J 1996 Silicon-microrelay with electrostatic moving wedge actuator - new functions and miniaturisation by micromechanics Micro System Technologies 96 (Potsdam, 1996) pp 463-8
2. Taylor W P and Allen M G 1997 Integrated magnetic microrelays: normally open, normally closed, and multi-pole devices Transducers '97 (Chicago, IL, 1997) pp 1149-52
3. Schiele I, Huber J, Hillerich B and Kozlowski F 1998 Surface-micromachined electrostatic microrelay Sensors Actuators A 66 345-54
4. Legtenberg R, Gilbert J, Senturia S D and Elwenspoek M 1997 Electrostatic curved electrode actuators J. Microelectromech. Syst. 6 257-65
5. 1996 Engineer's Relay Handbook (Milwaukee. WI: National Association of Relay Manufacturers)
6. Sauer H 1975 Relais Lexikon (Munich: Franz'sche Buchdruckerei)