Monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation

Journal of Micromechanics and Microengineering

Volumn 9, Issue 1, 1999, Pages 45-50

  Zhou, Shifang ^a,b   Sun, Xi Qing ^a,c   Carr, William N ^a,d  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^b SMSC   (United States)

^c MOTOROLA INC   (United States)

^d NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DIGITAL CONTROL SYSTEMS; ELECTRIC CONTACTS; ELECTRIC POTENTIAL; ELECTRIC RELAYS; ELECTROSTATICS; MICROMACHINING; SILICON; TANTALUM COMPOUNDS; THERMOELECTRICITY;

ELECTROSTATIC VOLTAGE; MICRORELAYS; MONOLITHIC VARIABLE INDUCTOR NETWORK; THERMAL POWER;

ELECTRIC CONDUCTORS;

EID: 0033099111     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/1/305     Document Type: Article

References (13)

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