Techniques for reliability analysis of MEMS RF switch

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2002, Pages 116-117

  DeNatale, Jeffrey ^a   Mihailovich, Robert ^a   Waldrop, James ^a  

^a ROCKWELL SCIENTIFIC COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BANDWIDTH; ELECTRIC RESISTANCE; RELIABILITY THEORY; SWITCHES;

DIELECTRIC CHARGING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036081999     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. MEM relay for reconfigurable RF circuits