Low-voltage lateral-contact microrelays for RF applications

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 645-648

  Wang, Ye ^a   Li, Zhihong ^a   McCormick, Daniel T ^a   Tien, Norman C ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCIES; GOLD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR RELAYS; SILICON NITRIDE; THERMAL EXPANSION;

ELECTROTHERMAL ACTUATORS; LATERAL CONTACT; LOW-STRESS SILICON NITRIDE; LOW-VOLTAGE LATERAL-CONTACT MICRORELAYS;

ACTUATORS;

EID: 0036122171     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. A low-voltage actuated micromachined microwave switch using torsion springs and leverage
2. Electroplated RF MEMS capacitive switches
3. Performance and dynamics of a RF MEMS switch
4. MEM relay for reconfigurable RF circuits
5. Lateral MEMS microcontact considerations
6. Lateral polysilicon Microrelays with a mercury microdrop contact
7. Bent-beam electrothermal actuator-part I; Single beam and cascaded devices
8. Analysis and design of electrothermal actuators fabricated from single crystal silicon
9. Contact physics of gold microcontacts for MEMS switches