Fully integrated magnetically actuated micromachined relays

Journal of Microelectromechanical Systems

Volumn 7, Issue 2, 1998, Pages 181-191

  Taylor, William P ^a,b,e   Brand, Oliver ^c,e,f   Allen, Mark G ^a,d,g,h  

^a IEEE   (United States)

^b TELEDYNE SCIENTIFIC COMPANY   (United States)

^c ETH ZURICH   (Switzerland)

^d GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^e GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^f UNIVERSITY OF KARLSRUHE   (Germany)

^g UNIVERSITY OF PENNSYLVANIA   (United States)

^h MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electromagnetic; Magnetic; Micromachined; Relay; Switch

Indexed keywords

COMPUTER AIDED ANALYSIS; COMPUTER SOFTWARE; ELECTRIC RELAYS; ELECTRIC RESISTANCE; ELECTRIC SWITCHES; ELECTROMAGNETIC FIELD EFFECTS; EQUIPMENT TESTING; FINITE ELEMENT METHOD;

MAGNETICALLY ACTUATED MICROMACHINED RELAYS; SOFTWARE PACKAGE ANSYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032098272     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.679353     Document Type: Article

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