The vulnerable nanoscale dielectric

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 3, 2007, Pages 653-662

  Stoneham, Marshall ^a   Gavartin, Jacob ^a   Ramo, David Muñoz ^a   Shluger, Alexander ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

SILICA GLASSES; SURFACE PASSIVATION; WIDE-GAP;

LITHOGRAPHY; OXIDE SUPERCONDUCTORS; OXYGEN VACANCIES; PASSIVATION; SEMICONDUCTING SILICON; SILICA;

DIELECTRIC MATERIALS;

EID: 34547204148     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200673836     Document Type: Review

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