Atomic and ionic processes of silicon oxidation

Physical Review B - Condensed Matter and Materials Physics

Volumn 63, Issue 24, 2001, Pages

  Stoneham, A Marshall ^a   Szymanski, Marek A ^a   Shluger, Alexander L ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON;

ARTICLE; EXCITATION; IMAGE QUALITY; ION TRANSPORT; OXIDATION; SOLUBILITY; STRUCTURE ANALYSIS;

EID: 0034899494     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.63.241304     Document Type: Article

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