-
3
-
-
0035839137
-
-
J. Akimitsu, K. Takenawa, K. Suzuki, H. Harima, and Y. Kuramoto, Science 293, 1125 (2001).
-
(2001)
Science
, vol.293
, pp. 1125
-
-
Akimitsu, J.1
Takenawa, K.2
Suzuki, K.3
Harima, H.4
Kuramoto, Y.5
-
4
-
-
0033521973
-
-
D. P. Young, D. Hall, M. E. Torelli, Z. Fisk, J. L. Sarrao, J. D. Thompson, H.-R. Ott, S. B. Oseroff, R. G. Goodrichk, and R. Zysler, Nature (London) 397, 412 (1999).
-
(1999)
Nature (London)
, vol.397
, pp. 412
-
-
Young, D.P.1
Hall, D.2
Torelli, M.E.3
Fisk, Z.4
Sarrao, J.L.5
Thompson, J.D.6
Ott, H.-R.7
Oseroff, S.B.8
Goodrichk, R.G.9
Zysler, R.10
-
8
-
-
0003821752
-
-
Noyes, Park Ridge, NJ
-
W. Kern, Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications (Noyes, Park Ridge, NJ, 1993).
-
(1993)
Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications
-
-
Kern, W.1
-
9
-
-
84929177658
-
-
Y. J. Chabal, G. S. Higashi, K. Raghavachari, and V. A. Burrows, J. Vac. Sci. Technol. A 7, 2104 (1989).
-
(1989)
J. Vac. Sci. Technol. A
, vol.7
, pp. 2104
-
-
Chabal, Y.J.1
Higashi, G.S.2
Raghavachari, K.3
Burrows, V.A.4
-
10
-
-
0039436914
-
-
M. L. Green, E. P. Gusev, R. Degraeve, and E. L. Garfunkel, J. Appl. Phys. 90, 2057 (2001).
-
(2001)
J. Appl. Phys.
, vol.90
, pp. 2057
-
-
Green, M.L.1
Gusev, E.P.2
Degraeve, R.3
Garfunkel, E.L.4
-
11
-
-
0032683840
-
-
E. P. Gusev, H.-C. Lu, E. L. Garfunkel, T. Gustafsson, and M. L. Green, IBM J. Res. Dev. 43, 265 (1999).
-
(1999)
IBM J. Res. Dev.
, vol.43
, pp. 265
-
-
Gusev, E.P.1
Lu, H.-C.2
Garfunkel, E.L.3
Gustafsson, T.4
Green, M.L.5
-
13
-
-
0000836443
-
-
edited by H. S.Nalwa (Academic, New York
-
M. Ritala and M. Leskelä, in Handbook of Thin Film Materials Vol. 234, edited by, H. S. Nalwa, (Academic, New York, 2002), pp. 183-198.
-
(2002)
Handbook of Thin Film Materials
, vol.234
, pp. 183-198
-
-
Ritala, M.1
Leskelä, M.2
-
14
-
-
0037115685
-
-
M. L. Green, M.-Y. Ho, B. Busch, G. D. Wilk, T. Sorsch, T. Conard, B. Brijs, W. Vandervorst, P. I. Räisänen, D. Muller, M. Bude, and J. Grazul, J. Appl. Phys. 92, 7168 (2002).
-
(2002)
J. Appl. Phys.
, vol.92
, pp. 7168
-
-
Green, M.L.1
Ho, M.-Y.2
Busch, B.3
Wilk, G.D.4
Sorsch, T.5
Conard, T.6
Brijs, B.7
Vandervorst, W.8
Räisänen, P.I.9
Muller, D.10
Bude, M.11
Grazul, J.12
-
15
-
-
0141858720
-
-
E. P. Gusev, J. C. Cabral, M. Copel, C. D'Emic, and M. Gribelyuk, Microelectron. Eng. 69, 145 (2003).
-
(2003)
Microelectron. Eng.
, vol.69
, pp. 145
-
-
Gusev, E.P.1
Cabral, J.C.2
Copel, M.3
D'Emic, C.4
Gribelyuk, M.5
-
19
-
-
29144506542
-
-
ADE Technologies, Westwood, MA.
-
ADE Technologies, Westwood, MA.
-
-
-
-
20
-
-
29144468483
-
-
Princeton Measurement Corp., Princeton, NJ 08540.
-
Princeton Measurement Corp., Princeton, NJ 08540.
-
-
-
-
21
-
-
19744382602
-
-
M. Venkatesan, C. B. Fitzgerald, J. G. Lunney, and J. M. D. Coey, Phys. Rev. Lett. 93, 177206 (2004).
-
(2004)
Phys. Rev. Lett.
, vol.93
, pp. 177206
-
-
Venkatesan, M.1
Fitzgerald, C.B.2
Lunney, J.G.3
Coey, J.M.D.4
-
22
-
-
0000022335
-
-
J.-Y. Koo, J.-Y. Yi, C. Hwang, D.-H. Kim, and S. Lee, Phys. Rev. B 52, 17269 (1995).
-
(1995)
Phys. Rev. B
, vol.52
, pp. 17269
-
-
Koo, J.-Y.1
Yi, J.-Y.2
Hwang, C.3
Kim, D.-H.4
Lee, S.5
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