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Volumn 87, Issue 25, 2005, Pages 1-3

Absence of magnetism in hafnium oxide films

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; HAFNIUM OXIDE; HAFNIUM SILICATE; STAINLESS-STEEL TWEEZERS;

EID: 29144431589     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2146057     Document Type: Article
Times cited : (202)

References (25)
  • 13
    • 0000836443 scopus 로고    scopus 로고
    • edited by H. S.Nalwa (Academic, New York
    • M. Ritala and M. Leskelä, in Handbook of Thin Film Materials Vol. 234, edited by, H. S. Nalwa, (Academic, New York, 2002), pp. 183-198.
    • (2002) Handbook of Thin Film Materials , vol.234 , pp. 183-198
    • Ritala, M.1    Leskelä, M.2
  • 19
    • 29144506542 scopus 로고    scopus 로고
    • ADE Technologies, Westwood, MA.
    • ADE Technologies, Westwood, MA.
  • 20
    • 29144468483 scopus 로고    scopus 로고
    • Princeton Measurement Corp., Princeton, NJ 08540.
    • Princeton Measurement Corp., Princeton, NJ 08540.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.