Dielectrics for future transistors

Materials Today

Volumn 7, Issue 1, 2004, Pages 26-33

  Bersuker, G ^a   Zeitzoff, P ^b   Brown, G ^b   Huff, H R ^b  

^a SEMATECH   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; DIELECTRIC MATERIALS; ELECTRIC FIELDS; ELECTRON TRANSITIONS; ENERGY UTILIZATION; INTEGRATED CIRCUITS; LEAKAGE CURRENTS; PERMITTIVITY; POLYSILICON; THERMODYNAMIC STABILITY;

ELECTRONIC SPATIAL DISTRIBUTIONS; IONIC RADII;

GATES (TRANSISTOR);

EID: 0346765511     PISSN: 13697021     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-7021(04)00052-5     Document Type: Article

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