Growth of SiC substrates

International Journal of High Speed Electronics and Systems

Volumn 16, Issue 3, 2006, Pages 751-777

  Powell, Adrian ^a   Jenny, Jason ^a   Muller, Stephan ^a   Hobgood, H McD ^a   Tsvetkov, Valeri ^a   Lenoard, Robert ^a   Carter Jr , Calvin ^a  

^a Research Triangle Park   (United States)

Author keywords

Blue LEDs; High power switching; Hot wall epitaxy; Physical vapor transport; SiC substrates; Vapor phase epitaxy

Indexed keywords

GALLIUM NITRIDE; MICROWAVE DEVICES; SILICON CARBIDE; SWITCHING CIRCUITS; VAPOR PHASE EPITAXY;

HIGH POWER SWITCHING; HOT WALL EPITAXY; PHYSICAL VAPOR TRANSPORT; SIC SUBSTRATES;

SUBSTRATES;

EID: 34249668885     PISSN: 01291564     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0129156406004016     Document Type: Article

References (64)

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