Dual-frequency capacitive discharges: Effect of low-frequency current on electron distribution function

Physics of Plasmas

Volumn 12, Issue 5, 2005, Pages 1-10

  Kim, H C ^a   Lee, J K ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRON EMISSION; ION BOMBARDMENT; MATHEMATICAL MODELS; MAXWELL EQUATIONS; MONTE CARLO METHODS;

CAPACITIVELY COUPLED PLASMA (CCP); ELASTIC SCATTERING; ELECTRON DISTRIBUTION FUNCTION (EDF); SECONDARY ELECTRON EMISSION (SEE);

ELECTRIC DISCHARGES;

EID: 20844438708     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1888325     Document Type: Article

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