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Advanced Functional Materials

Volumn 17, Issue 6, 2007, Pages 919-926

Microdroplet and atomic force microscopy probe assisted formation of acidic thin layers for silicon nanostructuring

(4) Xie, Xian Ning a Chung, Hong Jing a Sow, Chorng Hour a Wee, Andrew Thye Shen a

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; CONCENTRATION (PROCESS); HYDROFLUORIC ACID; LITHOGRAPHY; SILICON;

ACIDIC-LAYER-BASED TECHNIQUE; ANODIC OXIDES; FIELD-ENHANCED NONEQUILIBRIUM DISSOCIATION;

NANOSTRUCTURED MATERIALS;

EID: 34248546189 PISSN: 1616301X EISSN: 16163028 Source Type: Journal
DOI: 10.1002/adfm.200600439 Document Type: Article

Times cited : (8)

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