Nano-oxidation of H-terminated p-Si(100): Influence of the humidity on growth and surface properties of oxide islands

Applied Physics Letters

Volumn 78, Issue 2, 2001, Pages 168-170

  Jungblut, H ^a   Wille, D ^a   Lewerenz, H J ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001339394     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1338501     Document Type: Article

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