Patterning of silicon surfaces with noncontact atomic force microscopy: Field-induced formation of nanometer-size water bridges

Journal of Applied Physics

Volumn 86, Issue 4, 1999, Pages 1898-1903

  Garcia, Ricardo ^a   Calleja, Montserrat ^a   Rohrer, Heinrich ^b  

^a INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

^b CSIC   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTATIONAL METHODS; DAMPING; INTERFACES (MATERIALS); NANOTECHNOLOGY; OXIDATION; THRESHOLD VOLTAGE;

NANOMETER-SIZE WATER BRIDGES; NONCONTACT ATOMIC FORCE MICROSCOPY;

SEMICONDUCTING SILICON;

EID: 0032607946     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370985     Document Type: Article

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