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Volumn 7, Issue 7, 2005, Pages 762-766

Enhanced anodic Si dissolution in water-ethanol acid fluoride media

Author keywords

Hydrofluoric acid; Silicon; SiO2 dissolution; Speciation; Water alcohol solutions

Indexed keywords

ANODES; DISSOLUTION; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTROLYTIC POLISHING; ETCHING; ETHANOL; HYDROFLUORIC ACID; OXIDATION; PH EFFECTS; REACTION KINETICS; SILICA; SILICON; VOLTAGE MEASUREMENT;

EID: 20344407824     PISSN: 13882481     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elecom.2005.04.040     Document Type: Article
Times cited : (5)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.