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Volumn 7, Issue 7, 2005, Pages 762-766
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Enhanced anodic Si dissolution in water-ethanol acid fluoride media
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Author keywords
Hydrofluoric acid; Silicon; SiO2 dissolution; Speciation; Water alcohol solutions
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Indexed keywords
ANODES;
DISSOLUTION;
ELECTRIC CURRENTS;
ELECTRIC POTENTIAL;
ELECTROLYTIC POLISHING;
ETCHING;
ETHANOL;
HYDROFLUORIC ACID;
OXIDATION;
PH EFFECTS;
REACTION KINETICS;
SILICA;
SILICON;
VOLTAGE MEASUREMENT;
ROTATING DISK VOLTAMMETRY;
SIO2 DISSOLUTION;
SPECIATION;
WATER-ALCOHOL SOLUTIONS;
ELECTROCHEMISTRY;
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EID: 20344407824
PISSN: 13882481
EISSN: None
Source Type: Journal
DOI: 10.1016/j.elecom.2005.04.040 Document Type: Article |
Times cited : (5)
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References (18)
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