Effect of humidity on nano-oxidation of p-Si(0 0 1) surface

Surface Science

Volumn 542, Issue 1-2, 2003, Pages 56-63

  Kuramochi, H ^a,b   Ando, K ^a,b   Yokoyama, H ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b SEIKO INSTRUMENTS INC   (Japan)

Author keywords

Atomic force microscopy; Oxidation; Silicon; Water

Indexed keywords

ATMOSPHERIC HUMIDITY; ATOMIC FORCE MICROSCOPY; DIFFUSION; ELECTRIC POTENTIAL; SILICON WAFERS;

NANO-OXIDATION;

OXIDATION;

EID: 0042389706     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(03)00912-9     Document Type: Article

References (17)

1. Dagata J.A., Schneir J., Harary H.H., Evans C.J., Postek M.T., Benett J. Appl. Phys. Lett. 56:1990;2001.
2. Held R., Heinzel T., Studerus P., Ensslin K., Holland M. Appl. Phys. Lett. 71:1997;2689 Matsumoto K., Gotoh Y., Maeda T., Dagata J.A., Harris J.S. Appl. Phys. Lett. 76:2000;239.
3. Held R., Heinzel T., Studerus P., Ensslin K., Holland M. Appl. Phys. Lett. 71:1997;2689 Matsumoto K., Gotoh Y., Maeda T., Dagata J.A., Harris J.S. Appl. Phys. Lett. 76:2000;239.
4. Onuki T., Tokizaki T., Watanabe Y., Tsuchiya T., Tani T. Appl. Phys. Lett. 80:2002;4629.
5. Davis Z.J., Abadal G., Hansen O., Borise X., Barniol N., Peres-Murano F., Boisen A. Ultramicroscopy. 97:2003;467.
6. Fontaine P.A., Dubois E., Stievenard D. J. Appl. Phys. 84:1998;1776.
7. Pérez-Murano F., Birkelund K., Morimoto K., Dagata J.A. Appl. Phys. Lett. 75:1999;199.
8. Garcia R., Calleja M., Rohrer H. J. Appl. Phys. 86:1999;1898.
9. Avouris P.h., Martel R., Hartel T., Sandstrom R. Appl. Phys. A. 66:1998;S659.
10. Avouris P., Hertel T., Martel R. Appl. Phys. Lett. 71:1997;285.
11. Jungblut H., Wille D., Lewerenz H.J. Appl. Phys. Lett. 78:2001;168.
12. Snow E.S., Jemigan G.G., Campbell P.M. Appl. Phys. Lett. 76:2000;1782.
13. Sugimura H., Nakagiri N. Jpn. J. Appl. Phys. 34:1995;3406.
14. Mayer G., Amer N.M. Appl. Phys. Lett. 53:1988;1045.
15. Dagata J.A., Inoue T., Itoh J., Matsumoto K., Yokoyama H. Appl. Phys. Lett. 73:1998;271.
16. Morimoto K., Pérez-Murano F., Dagata J.A. Appl. Surf. Sci. 158:2000;205.
17. Dagata J.A., Pérez-Murano F., Abadal G., Morimoto K., Inoue T., Itoh J., Yokoyama H. Appl. Phys. Lett. 76:2000;2710.