In situ negative patterning of p-silicon via scanning probe lithography in HF/EtOH liquid bridges

Journal of the American Chemical Society

Volumn 127, Issue 26, 2005, Pages 9380-9381

  Kim, Younghun ^a   Kang, Sung Koo ^a   Choi, Inhee ^a   Lee, Jeongjin ^a   Yi, Jongheop ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALCOHOL; SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; ENERGY; LIQUID; NANOTECHNOLOGY; OXIDATION; SCANNING PROBE LITHOGRAPHY; VAPORIZATION;

EID: 21644442609     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja052319v     Document Type: Article

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