Electrostatic nanolithography in polymers using atomic force microscopy

Nature Materials

Volumn 2, Issue 7, 2003, Pages 468-472

  Lyuksyutov, Sergei F ^a   Vaia, Richard A ^c   Paramonov, Pavel B ^a   Juhl, Shane ^c   Waterhouse, Lynn ^c   Ralich, Robert M ^a   Sigalov, Grigori ^b   Sancaktar, Erol ^b  

^a UNIVERSITY OF AKRON   (United States)

^b The University of Akron   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC BREAKDOWN; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; MASS TRANSFER; NANOTECHNOLOGY; THERMAL VARIABLES MEASUREMENT; THERMODYNAMIC PROPERTIES; VAN DER WAALS FORCES;

DIELECTRIC BREAKDOWN; ELECTROSTATIC NANOLITHOGRAPHY; ELECTROSTATIC PRESSURE GRADIENT; THERMOMECHANICAL WRITING;

ORGANIC POLYMERS;

POLYMER; TUNGSTEN;

ARTICLE; ATOMIC FORCE MICROSCOPY; NANOTECHNOLOGY;

MICROSCOPY, ATOMIC FORCE; NANOTECHNOLOGY; POLYMERS; TUNGSTEN;

EID: 0042265021     PISSN: 14761122     EISSN: None     Source Type: Journal    
DOI: 10.1038/nmat926     Document Type: Letter

References (28)

1. Chen, J., Reed, M. A., Rawlett, A. M. & Tour, J. M. Large on-off ratios and negative differential resistance in a molecular electronic device. Science 286, 1550-1552 (1999).
2. Huang, Y., Duan, X., Wei, Q. & Lieber, C. M. Directed assembly of one-dimensional nanostructures into functional networks. Science 291, 630-633 (2001).
3. The Future of Data Storage Technologies (International Technology Research Institute World Technology Division Report, Loyola, Maryland, 1999).
4. Lee, K. S. (ed.) Polymers for Photonic Applications: Nonlinear, Optical and Electroluminescence Polymers (Springer, New York, 2002).
5. Bastiaansen, C., Tervoort, T. & Weder, C. (eds) Polymers in Display Applications (Macromolecular Symposium 154, Wiley, New York, 2000).
6. Wallraff, G. M. & Hinsberg, W. D. Lithographic imaging techniques for the formation of nanoscopic features. Chem. Rev. 99, 1801-1822 (1999).
7. Xia, Y., Rogers, J. A., Paul, K. E. & Whitesides, G. W. Unconventional methods for fabricating and patterning nanostructures. Chem. Rev. 99, 1823-1848 (1999).
8. Xia, Y. & Whitesides, F. M. Soft lithography. Annu. Rev. Mater. Sci. 28, 153-184 (1998).
9. Levinson, H. J. & Arnold, W. H. in Handbook of Microlithography, Micro Machining and Microfabrication Vol.1 (ed. Rai-Choudhury, P.) 11-139 (SPIE, New York, 1997).
10. Bae, Y. et al. Tailoring transparency of imageable fluoropolymers at 157 nm by incorporation of hexafluoroisopropyl alcohol to photoresist backbones. Chem. Mater. 14, 1306-1313 (2002).
11. McCord, M. A. & Rocks, M. J. in Handbook of Microlithography, Micro Machining and Microfabrication Vol.1 (ed. Rai-Choudhury, P.) 139-252 (SPIE, New York, 1997).
12. 11 holes in 1 square centimeter. Science 276, 1401-1404 (1997).
13. Lammertink, R. et al. Nanostructured thin films of organic-organometallic block copolymers. One-step lithography with poly(ferrocenylsilanes) by reactive ion etching. Adv. Mater. 12, 98-103 (2000).
14. Piner, R. D., Zhul, J., Xu, F., Hong, S. & Mirkin, C. A. "Dip-Pen" nanolithography. Science 283, 661-663 (1999).
15. Chou, S. Y., Zhuang, L. & Guo, L. Lithographically induced self-construction of polymer microstructures for resistless patterning. Appl. Phys. Lett. 75, 1004-1006 (1999).
16. Chou, S. Y. & Zhuang, L. Lithographically induced self-assembly of periodic polymer micropillar arrays. J. Vac. Sci. Tech. B 17, 3197-3202 (1999).
17. Herminghaus, S. Dynamical instability of thin liquid films between conducting media. Phys. Rev. Lett. 83, 2359-2361 (1999).
18. Schaffer, E., Thurn-Albrecht, T., Russel, T. & Steiner, U. Electrically induced structure formation and pattern transfer. Nature 403, 874-877 (2000).
19. Mamin, H. J. & Rugar, D. Thermomechanical writing with an atomic force microscope tip. Appl. Phys. Lett. 61, 1003-1005 (1992).
20. Vettiger, P. et al. The "millipede" - more than one thousand tips for future AFM data storage. IBM J. Res. Develop. 44, 323-340 (2000).
21. Vettiger, P. et al. The "millipede" - nanotechnology entering data storage. IEEE Trans. Nanotech. 1, 39-55 (2002).
22. Lyuksyutov, S. F., Paramonov, P. B., Dolog, I. I. & Ralich, R. M. Peculiarities of anomalous electronic current during AFM-assisted nanolithography on n-type silicon. Nanotechnology 14, 716-721 (2003).
23. Perez-Murano, F., Birkelund, K., Morimoto, K. & Dagata, J. Voltage modulation scanned probe oxidation Appl. Phys. Lett. 75, 199-201 (1999).
24. Kroschwitz, J. I. (ed.) Electrical and Electronic Properties of Polymers: A State-of-the-Art Compendium 116-119 (Wiley, New York, 1988).
25. Gorbunov, V. V., Fuchigami, N. & Tsukruk, V. V. Microthermal probing of thin polymer films. High Perf. Polym. 12, 603-610 (2000).
26. Tanner, R. I. Engineering Rheology (Clarendon, Oxford, UK, 1985).
27. Osswald, T. A. & Menges, G. Material Science of Polymers for Engineers 384-403 (Hansen & Gardner, New York, 1996).
28. g and low dielectric constant. J. Polym. Sci. A 38, 1991-2003 (2000).