Sheath impedance effects in very high frequency plasma experiments

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 1, 1996, Pages 132-138

  Schwarzenbach, W ^a   Howling, A A ^a   Fivaz, M ^a   Brunner, S ^a   Hollenstein, Ch ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030549049     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579908     Document Type: Article

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