An integrated system of microcantilever arrays with carbon nanotube tips for imaging, sensing, and 3D nanomanipulation: Design and control

Sensors and Actuators, A: Physical

Volumn 134, Issue 1, 2007, Pages 286-295

  Lee, Eunjeong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Atomic force microscopy; Micro actuator; Nanotechnology; Simulation; Systems engineering

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; IMAGING TECHNIQUES; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SYSTEMS ENGINEERING; THREE TERM CONTROL SYSTEMS;

3D NANOMANIPULATION; DISTRIBUTED PARAMETER SYSTEM; MICRO ACTUATOR; MICROCANTILEVER ARRAYS; NANOELECTRODES;

CARBON NANOTUBES;

EID: 33847323504     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.06.046     Document Type: Article

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