Carbon nanotube tip probes: Stability and lateral resolution in scanning probe microscopy and application to surface science in semiconductors

Nanotechnology

Volumn 12, Issue 3, 2001, Pages 363-367

  Nguyen, Cattien V ^a,b   Chao, Kuo Jen ^c   Stevens, Ramsey M D ^a,b   Delzeit, Lance ^a   Cassell, Alan ^a,b   Han, Jie ^a,b   Meyyappan, M ^a  

^a NASA AMES RESEARCH CENTER   (United States)

^b NASA HEADQUARTERS   (United States)

^c CHARLES EVANS AND ASSOCIATES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAM SPUTTERING; SCANNING PROBE MICROSCOPY; SINGLE-WALLED CARBON NANOTUBE; SURFACE SCIENCE;

ATOMIC FORCE MICROSCOPY; IMAGING SYSTEMS; ION BEAMS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR MATERIALS; SILICON NITRIDE; SPUTTERING; SURFACE TOPOGRAPHY; ULTRATHIN FILMS;

CARBON NANOTUBES;

EID: 0035442319     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/12/3/326     Document Type: Conference Paper

References (11)