Nanomechanical nose

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 9-13

  Lang, H P ^a   Baller, M K ^a   Battiston, F M ^a   Fritz, J ^a   Berger, R ^a   Ramseyer, J P ^a   Fornaro, P ^a   Meyer, E ^a   Guntherodt, H J ^a   Brugger, J ^a   Drechsler, U ^a   Rothuizen, H ^a   Despont, M ^a   Vettiger, P ^a   Gerber, Ch ^a   Gimzewski, J K ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; CHEMICAL SENSORS; CHEMISORPTION; COATINGS; INTERFACES (COMPUTER); METALLIC FILMS; MICROSENSORS; SILICON SENSORS; VAPORS;

NANOMECHANICAL NOSES; TIME MULTIPLEXED OPTICAL BEAM DEFLECTION METHOD;

MICROELECTROMECHANICAL DEVICES;

EID: 0032658378     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746743     Document Type: Conference Paper

References (12)