Texture development in nanocrystalline hafnium dioxide thin films grown by atomic layer deposition

Journal of Crystal Growth

Volumn 220, Issue 1-2, 2000, Pages 105-113

  Aarik, Jaan ^a   Aidla, Aleks ^a   Mändar, Hugo ^a   Sammelselg, Väino ^a   Uustare, Teet ^a  

^a UNIVERSITY OF TARTU   (Estonia)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; CRYSTAL ORIENTATION; CRYSTALLIZATION; CRYSTALLOGRAPHY; DEPOSITION; FILM GROWTH; HAFNIUM COMPOUNDS; NANOSTRUCTURED MATERIALS; SILICA; SILICON; SUBSTRATES; THIN FILMS;

ATOMIC LAYER DEPOSITION; NANOCRYSTALLINE FILMS;

DIELECTRIC FILMS;

EID: 0034320793     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00831-9     Document Type: Article

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