Piezoelectric thin film aln annular dual contour mode bandpass filter

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 517-523

  Stephanou, Philip J ^a   Piazza, Gianluca ^a   White, Carolyn D ^a   Wijesundara, Muthu B J ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNULAR RESONATOR; MULTI-POLE FILTERS; WAFER FABRICATION;

ALUMINUM NITRIDE; FITS AND TOLERANCES; PIEZOELECTRIC DEVICES; RESONATORS; THIN FILMS;

BANDPASS FILTERS;

EID: 33645978708     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-81679     Document Type: Conference Paper

References (12)

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