Mechanically temperature-compensated flexural-mode micromechanical resonators

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2000, Pages 399-402

  Hsu, W T ^a   Clark, J R ^a   Nguyen, C T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); THERMAL EFFECTS;

MICROMECHANICAL RESONATORS; TEMPERATURE INDUCED FREQUENCY SHIFTS;

RESONATORS;

EID: 0034454058     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)