Characterization of acoustic vibration modes at GHz frequencies in bulk acoustic wave resonators by combination of Scanning Laser Interferometry and Scanning Acoustic Force Microscopy

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 175-178

  Liu, X ^a,b   San Paulo, A ^a   Park, M ^a,c   Bokor, J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Cornell University   (United States)

^c SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE RECONSTRUCTION; INTERFEROMETRY; MATHEMATICAL MODELS; NATURAL FREQUENCIES; SCANNING; VIBRATIONS (MECHANICAL);

ACOUSTIC VIBRATIONS; MODE SHAPE CONSTRUCTION; SCANNING ACOUSTIC FORCE MICROSCOPY (SAFM); SCANNING LASER INTERFEROMETRY (SLI);

RESONATORS;

EID: 26844450319     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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