High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology

2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers

Volumn , Issue , 2004, Pages 147-150

  Pourkamali, Siavash ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Capacitive resonator; HARPSS; Micro electro mechanical (MEM); Self aligned

Indexed keywords

CAPACITIVE RESONATORS; HARPSS; POWER HANDLING; SELF-ALIGNED;

ASPECT RATIO; ELECTRODES; MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; TRANSDUCERS;

RESONATORS;

EID: 20344404949     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. S. Li, et al, "Micromechanical hollow-disk ring resonators", MEMS '04, pp. 821-824.
2. M. U. Demirci, et al, "Mechanically corner-coupled square microresonator array for reduce motional resistance", Transducers '03, pp. 955-958.
3. F. Ayazi and K. Najafi, "High Aspect-Ratio Combined Poly and Single-Crystal Silicon (HARPSS) MEMS Technology", JMEMS, Vol. 9, Issue: 3, 288, (2000).
4. S. Pourkamali, and F. Ayazi, "SOI-based HF and VHF single-crystal silicon resonators with sub-100nm nanometer vertical capacitive gaps", Transducers '03, pp.837-840.
5. M. A. Abdelmoneum, et al, "Stemless wine-glass-mode disk micromechanical resonators", MEMS '03, pp. 698-701.
6. J. Hao, et al, "VHF Single Crystal Silicon Capacitive Elliptic Bulk-Mode Disk Resonators Part II: Implementation and Characterization", to appear in JMEMS, 2004.
7. J. Wang, et al, "1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support", MEMS '04, pp. 641-644.