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Volumn 39, Issue 9, 2003, Pages 755-757

Temperature coefficient of SAW frequency in single crystal bulk AlN

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; ALUMINUM NITRIDE; CRYSTAL ORIENTATION; ELASTIC MODULI; SHEAR STRESS; SINGLE CRYSTALS; SUBLIMATION; TEMPERATURE MEASUREMENT; THERMAL EXPANSION;

EID: 0038734407     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20030488     Document Type: Article
Times cited : (39)

References (10)
  • 3
    • 0001495657 scopus 로고    scopus 로고
    • Elastic properties of zinc-blende and wurtzite AlN, GaN, and InN
    • WRIGHT, A.F.: 'Elastic properties of zinc-blende and wurtzite AlN, GaN, and InN', J. Appl. Phys., 1997, 82, pp. 2833-22839
    • (1997) J. Appl. Phys. , vol.82 , pp. 2833-22839
    • Wright, A.F.1
  • 4
    • 0001340020 scopus 로고    scopus 로고
    • First principles study on electronic and elastic properties of BN, AlN, and GaN
    • SHIMADA, K., SOTA, T., and SUZUKI, K.: 'First principles study on electronic and elastic properties of BN, AlN, and GaN', J. Appl. Phys., 1998, 84, pp. 4951-4958
    • (1998) J. Appl. Phys. , vol.84 , pp. 4951-4958
    • Shimada, K.1    Sota, T.2    Suzuki, K.3
  • 6
    • 3242813816 scopus 로고    scopus 로고
    • High temperature elastic constant prediction of some group III-nitrides
    • REEBER, R.R., and WANG, K.: 'High temperature elastic constant prediction of some group III-nitrides', MRS Internet J. Nitride Semicond. Res., 2001, 6, p. 3
    • (2001) MRS Internet J. Nitride Semicond. Res. , vol.6 , pp. 3
    • Reeber, R.R.1    Wang, K.2
  • 7
    • 0022115013 scopus 로고
    • Zero-temperature-coefficient SAW devices on AlN epitaxial films
    • TSUBOUCHI, K., and MIKOSHIBA, N.: 'Zero-temperature-coefficient SAW devices on AlN epitaxial films', IEEE Trans. Sonics Ultrason., 1985, SU-32, pp. 634-644
    • (1985) IEEE Trans. Sonics Ultrason. , vol.SU-32 , pp. 634-644
    • Tsubouchi, K.1    Mikoshiba, N.2
  • 8
    • 36449002342 scopus 로고
    • Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz-band surface acoustic wave devices
    • OKANO, H., TANAKA, N., TAKAHASHI, Y., TANAKA, T., SHIBATA, K., and NAKANO, S.: 'Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz-band surface acoustic wave devices', Appl. Phys. Left., 1994, 64, pp. 166-168
    • (1994) Appl. Phys. Left. , vol.64 , pp. 166-168
    • Okano, H.1    Tanaka, N.2    Takahashi, Y.3    Tanaka, T.4    Shibata, K.5    Nakano, S.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.