Performance degradation effects in FBAR filters and resonators due to Lamb wave modes

Proceedings - IEEE Ultrasonics Symposium

Volumn 3, Issue , 2005, Pages 1832-1835

  Ruby, Richard C ^a   Larson III, John D ^b   Fazzio, R Shane ^a   Feng, Chris ^a  

^a AGILENT TECHNOLOGIES   (United States)

^b AGILENT LABORATORIES   (United States)

Author keywords

k, Q; FBAR; Lamb mode; Piston mode; Rp; Rs

Indexed keywords

ACOUSTIC RESONATORS; ELECTRIC PROPERTIES; RAYLEIGH FADING; ULTRASONICS;

FILM BULK ACOUSTIC RESONATOR (EBAR); LAMB MODE; PISTON MODE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 33845542943     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603225     Document Type: Conference Paper

References (6)

1. J.D. Larson III, P. Bradley, S. Wartenberg, R. Ruby, "Modified Butterworth-Van Dyke Circuit for FBAR Resonators and Automated Measurement System," 2000 IEEE Ultra.Symp., pp. 863-868, Oct. 2000
2. K.L. Telschow, V. Deason, D. Cottle, J.D. Larson III, "Full-Field Imaging of GHz Film Bulk Acoustic Resonator Motion," IEEE Trans. Ultrason., Ferroelec., & Freq. Control, 50 (10), pp. 1279-1285, 2003
3. R.C. Ruby, J.D. Larson III, C. Feng, S. Fazzio, "The Effect of Perimeter Geometry on FBAR Resonator Electrical Performance," 2005 IEEE IMS Symposium, June 2005, in press.
4. K.L. Telschow, "Laser Acoustic Imaging of Film Bulk Acoustic Resonator (FBAR) Lateral Mode Dispersion," QNDE Conference, Golden, CO, July 2004.
5. J.D.Larson III, R. C. Ruby, P.Bradley, "Bulk Acoustic Resonator with Improved Lateral Mode Suppression," U.S. Patent 6,215,375, April 10, 2001.
6. B. A. Auld, Acoustic Fields and Waves in Solids, Volume II, New York, John Wiley & Sons, 1973, pp.29-99.