Porosity of low-κ materials studied by slow positron beam

Acta Physica Polonica A

Volumn 107, Issue 4, 2005, Pages 702-711

  Brusa, R S ^a   Macchi, C ^a   Mariazzi, S ^a   Karwasz, G P ^a  

^a UNIVERSITY OF TRENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; DOPPLER EFFECT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROSITY; POSITRON ANNIHILATION SPECTROSCOPY; THIN FILMS;

DOPPLER BROADENING SPECTROSCOPY; POSITRONIUM MEASUREMENTS;

ELECTRON BEAMS;

EID: 33751187637     PISSN: 05874246     EISSN: None     Source Type: Journal    
DOI: 10.12693/APhysPolA.107.702     Document Type: Article

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