Probing capped and uncapped mesoporous low-dielectric constant films using positron annihilation lifetime spectroscopy

Applied Physics Letters

Volumn 77, Issue 16, 2000, Pages 2470-2472

  Petkov, Mihail P ^a   Weber, Marc H ^a   Lynn, Kelvin G ^a   Rodbell, Kenneth P ^b  

^a WASHINGTON STATE UNIVERSITY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000400571     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1318238     Document Type: Article

References (16)

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